Ceramic Parts for Semiconductor Manufacturing Equipment

Ceramics are widely used in semiconductor manufacturing equipment where wiring is becoming finer and more multilayered. The use of lightweight, high-rigidity ceramics in exposure equipment and ceramics with plasma resistance, low particle count, heat resistance, and low dielectric loss in etching and deposition equipment is expanding. The wafer transfer arm uses ceramics with high precision and excellent mechanical properties. Sapphire is also used for windows, wafer carrier plates, wafer contact lift pins, plasma introduction tubes, etc., that require optical transparency.