EFEM・SORTER
Equipped with a high-performance AC servo motor, it achieves high-speed transfer with ample payload capacity. Robots, load ports, and hands can be arranged optimally; we have inherited over 20 years of robot technology operating in harsh environments.
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Wafer Transfer Equipment
300mm wafers are transported one by one to cassettes (containers) A to B.
Compatible cassettes (containers) are FOUP, FOSB, OPEN, and PFA.
The standard transport is in units of 1 sheet, but transport in units of 5 or 25 sheets is also available.
Wafer Cassette Changer
This equipment is a system that replaces the dicing frame for 200mm and 300mm stored in a specified cassette with a standard cassette.
The cassettes used are 6-sheet cassettes and 13-sheet cassettes. Each cassette is supplied to the stage by an operator.
Wafer Transfer Robot
Back and forth (X-axis), swivel (θ-axis), up-and-down (Z-axis) + hand rotation (0 to 180°) operations are possible, supporting wafer transfer in the atmosphere. The drive motor is an AC servomotor with absolute encoder specifications for all axes.
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Automation Engineering
Hardware, software programming, machine development, Ceramic table, Micro-precision punch & die, and more. AST has engineering experience for electrical wiring as well.
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