This equipment is a system that replaces the dicing frame for 200mm and 300mm stored in a specified cassette with a standard cassette.
The cassettes used are 6-sheet cassettes and 13-sheet cassettes. Each cassette is supplied to the stage by an operator.
|1.22 ± 0.08mm
|0.25mm or less
|Cassette with 6 sheets・Cassette with 13 sheets
|Frame storage pitch
|Takt time・Transportation time
|180 seconds/13 sheets or less