Wafer Cassette Changer
This equipment is a system that replaces the dicing frame for 200mm and 300mm stored in a specified cassette with a standard cassette.
The cassettes used are 6-sheet cassettes and 13-sheet cassettes. Each cassette is supplied to the stage by an operator.
Specifications
| Treated material | ||
|---|---|---|
| Dicing frame | Size | 200mm・300mm |
| Thickness | 1.22 ± 0.08mm | |
| Warp | 0.25mm or less | |
| Contactable range | Back side | |
| Career | Standard cassette | Cassette with 6 sheets・Cassette with 13 sheets |
| Frame storage pitch | 15mm | |
| Throughput | Takt time・Transportation time | 180 seconds/13 sheets or less |