Focus Ring
- Characteristics
-
- High purity
- High Density
- High thermal conductivity
- Features
-
- Fewer metal contamination on wafers
- Excellent outgas performance and few particles
- Excellent cooling rate and thermal response
Products
| Applications | Products |
|---|---|
| Etch system / apparatus | Ceramic suction table, Shower plate, Focus ring etc. |
| Plasma CVD apparatus, thermal CVD apparatus | Susceptor etc. |
| Thermal processing apparatus | Susceptor, wafer holder etc. |