Transfer Arm
It is a damage-free transfer arm that can withstand high temperatures. In addition, it is also possible to coat the ceramic surface with a coating such as DLC (Diamond Like Carbon) to improve functionality, such as mitigating damage to sliding mating materials and preventing the diffusion of impurities.
Keywords: high temperature resistance
Product data
| Transfer Arm | |
|---|---|
| Material | Alumina, Silicon Carbide |
| Size | For φ200 ⁄ 300 mm equipment |
| Application example | Wafer transport |