Ceramic suction table
- Characteristics
-
- High purity
- High Density
- High thermal conductivity
- Features
-
- Fewer metal contamination on wafers
- Excellent outgas performance and few particles
- Excellent cooling rate and thermal response
Products
| Ceramic suction table | |
|---|---|
| Suction hole diameter | Φ1.5 |
| Material | Alumina black |
| High purity | 85% |
| Reflectivity (400nm) | 6.29 |
| Bending strength | 326Mpa |
| Specific gravity | 3.8 |
| Thermal expansion coefficient | 7.5×10 -6 |
| It is made up of two plates, and the air channels are dug on the bottom. | |
| Low reflectivity | |
| Applications | Products |
|---|---|
| Etch system / apparatus | Ceramic suction table, Shower plate, Focus ring etc. |
| Plasma CVD apparatus, thermal CVD apparatus | Susceptor etc. |
| Thermal processing apparatus | Susceptor, wafer holder etc. |